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Cal Semi offers a full line of used Diffusion Furnaces for the Semiconductor Industry. Custom Modifications are available

Features

S2 Compliant E.M.O. Circuitry Redundant Overtemp Control Electropolished SS Scavengers Resetable Breakers Sequencer or DDC Control

Description

Cal Semi's modifications are designed to help with the Process and Equipment Engineering functions. The controls can be as complex or as simple as the process dictates. Cal Semi can modify these systems to be compatible with most OEM brands of process controls. These include: SVG Thermco, ICCI, BTU Bruce, Semy, ITS, Eurotherm and many others. Standards include flat zones up to 40 inches long, and continuous operating temperatures from 200 to 1275 degrees Celsius. Cal Semi was the pioneer in 300 mm horizontal furnace technology with the first banks installed in 1996. When integrated with Cal semi gas panels, and either Digital Sequencer or DDC process controls the result is a powerful and cost effective processing tool designed to meet any customer need. Please contact us with any custom layout inquires.

SVG Thermco, ICCI, BTU Bruce, Semy, ITS, and Eurotherm are registered trademarks of their respective owners

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